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We developed a process for fabricating a miniaturized hinged mechanism for microrobots by customizing our previously reported flapping-wing method to fabricate microscopic wing structures resembling insects. Flexible hinges were realized by removing the titanium layers of the structure, which were previously sandwiched between thin polyimide layers. A three-dimensional structure can also be realized via origami-like assembly owing to the hinge structure, where the hinge is made to work as a crease. Details of our method and a reference
