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To validate the design, we revealed a 960 l/mm, 50×50×1.5 mm3 grating to a laser power density of 3.61 kW/cm2 and observed the temperature change. We used a Twyman-Green interferometer to measure the disturbance fringes regarding the grating surface. Based on the Fourier-transform strategy and a Zernike polynomial suitable method, the real-time grating area profile is reconstructed. The outcomes reveal that substrate width boost or area reduce can lessen thermal deformation, the average de
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