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18 pM for miR-221, 0.23 pM for miR-486-5p, and 0.22 pM for miR-21. And the relative standard deviations (RSDs) for 10 pM target miRNA were less than 3.7%. This work promises a potential ultrasensitive ICP-MS bioassay of multiplex miRNA biomarkers for clinical serum diagnosis.One-dimensional zinc oxide arrays with various finely controlled microscopic morphologies are grown on fluorine-doped tin oxide substrates by a hydrothermal method. The relationship between the microscopic morphologies and the reaction conditions are studied deeply.