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This research offers a feasible solution for highly accurate SEM calibration needed for 3D nanometrology and hybrid metrology demanded in metrology of modern nanoelectronics devices and systems.We conducted ex-situ catalytic fast co-pyrolysis (co-CFP) of corn stalk (CS) and high-density polyethylene (HDPE) over HZSM-5 catalyst to enhance the production of hydrocarbons. The effect of pyrolysis temperature and CS-to-HDPE mass ratio (CS/HDPE) on the yield of condensable volatile organic products (CVOPs) and the relative content of hydrocar
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