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091 to 0.187 nm with the increasing substrate temperature. X-ray diffraction and transmission electron microscopy investigation showed that Ga2O3 films grown at temperatures from 80 to 200 °C were amorphous, and the Ga2O3 film grown at 250 °C was slightly crystalline with some nanocrystalline structures.The commercial utilization of bulk nanosilica is widespread in concrete, rubber and plastics, cosmetics and agriculture-related applications, and the market of this product is projected to exceed USD 5 billion by 2025. In this investigat