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To document the evolution of the corresponding concentration profiles with time, electron dispersive X-ray spectroscopy (EDX) was used and the data are reported in Excel files. From these concentration profiles, the widths of the diffusion affected zones for Ni and Cr were systematically determined at different temperatures and times, apparent diffusion coefficients were deduced and all these data are provided in tables. The research data reported here have a fundamental value and document the growth kinetics of σ precipitates within g