https://www.selleckchem.com/pr....oducts/pd-1-pd-l1-in
This study investigated the multilayer growth and properties of ZnS and MgF2using glancing angle deposition. We used deposition angles of 85° to 89° for ZnS and 70° to 88° for MgF2to obtain the structural properties. The film properties primarily followed Tait's rule with a deposition angle of less than 87° in the vapor flux. However, film growth with a vapor flux angle of 88° to 89° followed the tangent rule. Mathematical and cross-sectional scanning electron microscopy (SEM) examinations found a transition point for the
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