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The research focused on materials having potential applications in technology of planar evanescent wave sensors. Four samples of binary SiO2TiO2 thin films having different titania content were manufactured through the sol-gel method and dip-coating technique on polished silicon substrates. The samples were subjected to repeated heating/cooling protocols. Simultaneously, their optical parameters were monitored by spectroscopic ellipsometry as they evolved under varying temperature. Subsequent analysis confirmed linear dependence of refra
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