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We observe a linear relationship between the lifetime of Cu nanodisk arrays in 1× PBS at 37 °C and the nanolaminated coating thickness, and ∼1.3 nm nanolaminated coatings of ∼10 ALD cycles can extend the lifetime of Cu plasmonics up to ∼20 days. Furthermore, we find that the anticorrosion performance of Al2O3/HfO2 nanolaminated ALD coatings strongly depends on the processing and the geometric parameters, such as the annealing temperature and the nanolaminated backbone unit size.Platforms for enzyme delivery must simultaneously have pla