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We report on the optical and morphological properties of silica thin layers deposited by reactive RF magnetron sputtering of a SiO2 target under different oxygen to total flow ratios [r(O2) = O2/Ar, ranging from 0 to 25%]. The refractive index (n), extinction coefficient, total transmission, and total reflectance were systematically investigated, while field-emission scanning electron microscopy, atomic force microscopy, and three-dimensional (3D) average roughness data construction measurements were carried out to probe the surface morphology. Contact angl
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