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The effective energy and momentum impartment to the resist by the ion, as revealed by recoil atom cascades and vacancy formation, is important to significantly expanding the material types suitable for ion beam lithography. © 2020 IOP Publishing Ltd.The fabrication of bendable electronic devices is being a scientific-technological area of very rapid advance in which new materials and fabrication techniques are being continuously developed. In this kind of devices, the fabrication of flexible conductive electrodes adherent to the substra
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