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Electric area enhancement because of nodular defects within quarter-wave optical width multilayer mirrors is influenced by the inclusion diameter, inclusion level, inclusion structure, nodular shape, multilayer angular bandwidth, multilayer finish materials, range layers, direction of occurrence, and polarization. In this modeling research, the electric area improvement for surface inclusions with diameters as much as 2 µm irradiated at 1064 nm at either regular or 45 deg occur